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We summarized The present development position in the high-electric power DUV laser each for the wavelength of FHG with the 1-μm laser and at 193 nm. The recent growth on the reliable-point out/fiber laser, plus the nonlinear optical crystals, prompts not simply the common electric power but also the beam top quality (coherence) in the DUV lasers to an unprecedented stage.
The average electricity of the NIR laser continue to has the prospective to generally be improved to tens of watts such as 70 W [26] In case the double-pass configuration might be used for the Yb:YAG SCF amplifier phase. Consequently, In the event the conversion efficiency of 31% from NIR to DUV may be continue to preserved at this better electrical power condition, the typical output energy in the DUV laser at 258 nm may very well be much more than twenty W, which might be described as a amazing electricity degree with the DUV laser and lead to the unanticipated DUV laser machining final results. Furthermore, for top-electricity DUV laser, the UV injury from the nonlinear crystal, such as the windows for CLBO crystal as well as the mirrors, is another important parameter for lasting and steady operation.
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On one other facet, the ability scaling on the NIR laser is an additional facet to boost the typical power of the 193-nm DUV laser. Due to the deficiency of the high-electric power amplification Remedy of the NIR laser (as an example at 1553 nm), nonlinear frequency procedures including optical parameter oscillation (OPO) could be applied to produce a wavelength converter by shifting the wavelength from one μm to the specified wavelength as well as acquiring relative larger power [21]. Not too long ago, a diamond Raman laser confirmed its capacity in acquiring a large electric power in addition to a higher conversion effectiveness within the 1st Stokes on the 1-μm laser [22,23], which suggests the likelihood to get utilized while in the 193-nm DUV laser era on account of its substantial Raman achieve and huge frequency shift.
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During the scientific and industrial purposes, the beam quality from the DUV laser is additionally a vital parameter. Notably, the beam good quality on the DUV laser considerably influences the laser machining effects. The beam high quality from the DUV laser is decided by that of the fundamental laser and the crystal for that frequency conversion. Lately, a superior-electricity DUV laser (>ten W) at 258 nm was documented that has a beam high quality of M2 < one.five, which was generated by FHG of a Yb:YAG laser at 1030 nm using the CLBO crystal [thirteen]. This laser would result in an even better laser machining result when compared to the prior DUV lasers with more substantial M2.
The heart beat period of the 2nd Stokes mild was shortened to 5 ns as demonstrated in Determine 7a, one-shot photo within the oscilloscope, which is a typical phenomenon in Raman laser [forty four] while the pulse length from the pump laser was 10 ns.
Also, combining the strong-condition laser with other nonlinear procedure for example stimulated Raman scattering, NIR lasers may be attained at new wavelengths with superior electrical power and superior beam excellent, which was examined with the evidence-of-principle experiment. This Raman laser scheme presents a whole new path to the higher-energy DUV laser, Specially for the wavelength of 193 click here nm.
Tunable ultraviolet laser source according to stable-condition dye laser technological know-how and CsLiB6O10 harmonic technology
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